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Efficient maintenance by automated condition monitoring of overhead hoist transport system for semiconductor fabs.

For the safe and fast transport of wafers in 300 mm semiconductor fabs, overhead hoist transport systems (OHT) are primarily used. These systems consist of rail network and vehicles. In order to avoid congestions, delays and downtimes during production, high availability of the individual rail sections and vehicles is essential. To guarantee this, costly preventive maintenance was previously necessary. In a joint research project, Technische Universität Dresden and GLOBALFOUNDRIES implemented predictive maintenance solutions that allow automatic condition monitoring of rail network and vehicles. The developed monitoring system enables reliable, needs-based, resource-saving and efficient maintenance in 24/7 semiconductor manufacturing.