Philippe Baldet

ATG Technologies

FSI Smart Cell-The Most advanced FSI Mercury automation solution

'ATG Technologies will present today its FSI Smart Cell. This automation solution is a Full automatic loading/unloading system for the worldwide used FSI Mercury spray cleaning machine for silicon wafers:
Equipement main Fixtures:
- DMS<->Teflon cassetes transfer
- Mirror balancing with dumies (complementation)
- Place and go starting mode
- Full communication with MES thru our proprietary SECS/GEM interface
- Available for 6’’ and 8’’

25 equipments already installed within worldwide Fabs with the following observed benefits for users:
- No manual handling anymore (3,7 ton of material manipulation saved everyday on each machine)
- Throughput increase by 15%
- Wafer breaks reductions by 95%

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