Falk Allmrodt

DAS Environmental Expert GmbH

The Road to a Zero-Emission Sub-Fab

The semiconductor industry has made a rather mixed response to the carbon neutral requirements as demanded by our current climate challenges. Semiconductor companies have relative conservatively committed to carbon neutrality by 2050 while others have been much more aggressive in their timelines. The Sub-Fab and its associated equipment has a considerable impact on the overall eCO2 emissions. This short presentation will discuss the opportunities, potentials and challenges to a carbon neutral footprint particularly focusing on the abatement requirements in the Sub-Fab and the interactions with the surrounding equipment.

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