3307

Speaker

Dr. Torsten Thieme

DEAXO GmbH

A promising approach to create a digital twin of a real fab

In the nearest future there will be no newly built advanced fab without a digital twin. Building Information Modeling (BIM) is an approach to create a static model of a future fab, where all functionalities are automatically simulated and optimized during the design phase. Such a BIM model is created not only for construction but for the whole life cycle of the project. It must be updated carefully! This approach requires well defined standard interfaces for equipment manufacturers, for the measurement systems (to gain real time data) and for control-signals (to run the fab). Such models are the base to create Cyber-physical systems for Industry 4.0 (smart fab). Essential for a digital twin is an operator-friendly, easy-to-use surface to run the system.

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